PT Unknown AU Fujioka, K TI Kinetic Monte Carlo Simulations of Cluster Growth in Magnetron Plasmas PY 2015 PU Christian-Albrechts-Universität zu Kiel WP https://macau.uni-kiel.de/receive/diss_mods_00017901 LA en DE kinetic Monte Carlo; Monte Carlo; cluster; magnetron; plasma; nanoparticle AB The present thesis is focused on the growth and development of nano-sized clusters in magnetron cluster sources with an emphasis on how these particles can be modeled through kinetic Monte Carlo simulations. In developing our kinetic Monte Carlo model, we find that standard kinetic Monte Carlo methods are insufficient to accurately capture the full dynamics of the system. We therefore develop a variation to standard kinetic Monte Carlo algorithms that allows for the fluctuating of background conditions to be taken into account. This new variation is analyzed and tested to ensure its agreement with standard methods and is shown to better capture the variability of process rates within the system. Throughout our analysis we focus on the cluster size distribution. Results of the model are examined for the effect of parameter variations to gain insight into how the various processes affect cluster growth. We compare results with an experimental study and find that the developed model can accurately reproduce the size distributions of emitted clusters. PI Kiel ER