000K utf8 1100 $c2022 1500 eng 2050 urn:nbn:de:gbv:8:3-2023-00320-3 2051 10.1002/ppap.202200118 3000 Marxen, M. Leander 3010 Adelung, Rainer 3010 Drewes, Jonas 3010 Greve, Erik 3010 Hansen, Luka 3010 Kersten, Holger 3010 Reimers, Armin 3010 Saure, Lena M. 3010 Schütt, Fabian 3010 Tjardts, Tim 4000 On the plasma permeability of highly porous ceramic framework materials using polymers as marker materials [Marxen, M. Leander] 4209 Highly porous framework materials are of large interest due to their broad potential for application, for example, as sensors or catalysts. A new approach is presented to investigate, how deep plasma species can penetrate such materials. For this purpose, a polymer (ethylene propylene diene monomere rubber) is used as marker material and covered with the porous material during plasma exposure. Water contact-angle and X-ray photoelectron spectroscopy measurements are used to identify changes in the polymer surface, originating from the interaction of plasma species with the polymer. The method is demonstrated by studying the plasma permeability of tetrapodal zinc oxide framework materials with a porosity of about 90% in an oxygen low-pressure capacitively coupled plasma. Significant differences in the penetration depth ranging from roughly 1.6–4 mm are found for different densities of the material and different treatment conditions. 4950 https://doi.org/10.1002/ppap.202200118$xR$3Volltext$534 4950 https://nbn-resolving.org/urn:nbn:de:gbv:8:3-2023-00320-3$xR$3Volltext$534 4961 https://macau.uni-kiel.de/receive/macau_mods_00003639 5051 530 5550 low ‐ pressure discharges 5550 plasma permeability 5550 polymer activation 5550 porous materials 5550 tetrapodal zinc oxide