000K  utf8
1100  $c2022
1500  eng
2050  urn:nbn:de:gbv:8:3-2023-00320-3
2051  10.1002/ppap.202200118
3000  Marxen, M. Leander
3010  Adelung, Rainer
3010  Drewes, Jonas
3010  Greve, Erik
3010  Hansen, Luka
3010  Kersten, Holger
3010  Reimers, Armin
3010  Saure, Lena M.
3010  Schütt, Fabian
3010  Tjardts, Tim
4000  On the plasma permeability of highly porous ceramic framework materials using polymers as marker materials  [Marxen, M. Leander]
4209  Highly porous framework materials are of large interest due to their broad potential for application, for example, as sensors or catalysts. A new approach is presented to investigate, how deep plasma species can penetrate such materials. For this purpose, a polymer (ethylene propylene diene monomere rubber) is used as marker material and covered with the porous material during plasma exposure. Water contact-angle and X-ray photoelectron spectroscopy measurements are used to identify changes in the polymer surface, originating from the interaction of plasma species with the polymer. The method is demonstrated by studying the plasma permeability of tetrapodal zinc oxide framework materials with a porosity of about 90% in an oxygen low-pressure capacitively coupled plasma. Significant differences in the penetration depth ranging from roughly 1.6–4 mm are found for different densities of the material and different treatment conditions.
4950  https://doi.org/10.1002/ppap.202200118$xR$3Volltext$534
4950  https://nbn-resolving.org/urn:nbn:de:gbv:8:3-2023-00320-3$xR$3Volltext$534
4961  https://macau.uni-kiel.de/receive/macau_mods_00003639
5051  530
5550  low ‐ pressure discharges
5550  plasma permeability
5550  polymer activation
5550  porous materials
5550  tetrapodal zinc oxide