Dissertation (Metadaten)
Titel:Design and investigation of microelectromechanical (MEMS) varactors
 
Autor:Maxim Shakhray
 
URN:NBN:urn:nbn:de:gbv:8-diss-14195
 
Fakultät:Technische Fakultät
DDC Sachgebiet:620 Ingenieurwissenschaften und Maschinenbau
 
Datum der mdl. Prüfung:02.05.2005
 
Referent(in):Prof. Dr. Anton Heuberger
Korreferent(en) Korreferentin:Prof. Dr. Helmut Foell
 
Beschreibung:Three surface micromachined all-metal electrostatically driven varactors were designed, fabricated, and tested at low frequency (10 kHz) in the presented work. Capacity ratios of 1.65, 3.29, and 4.36 were measured. Main problems with possible solutions were discussed. Ways to improve the capacity ratios were proposed.
 
Schlagworte:Varactor, MEMS, microelectromechanical, variable capacitor
 
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