Design and investigation of microelectromechanical (MEMS) varactors
Three surface micromachined all-metal electrostatically driven varactors were designed, fabricated, and tested at low frequency (10 kHz) in the presented work. Capacity ratios of 1.65, 3.29, and 4.36 were measured. Main problems with possible solutions were discussed. Ways to improve the capacity ratios were proposed.