On the plasma permeability of highly porous ceramic framework materials using polymers as marker materials

Highly porous framework materials are of large interest due to their broad potential for application, for example, as sensors or catalysts. A new approach is presented to investigate, how deep plasma species can penetrate such materials. For this purpose, a polymer (ethylene propylene diene monomere rubber) is used as marker material and covered with the porous material during plasma exposure. Water contact-angle and X-ray photoelectron spectroscopy measurements are used to identify changes in the polymer surface, originating from the interaction of plasma species with the polymer. The method is demonstrated by studying the plasma permeability of tetrapodal zinc oxide framework materials with a porosity of about 90% in an oxygen low-pressure capacitively coupled plasma. Significant differences in the penetration depth ranging from roughly 1.6–4 mm are found for different densities of the material and different treatment conditions.


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